Niobium sputtering targets, Niobium disc Material: RO4200-1, RO4210-2 Size: circular targets: Diameter 10mm up to 400mm x Thickness 2mm up to 28mm rectangular targets: Thickness 1mm up to 20.32mm x Width up to 800mm x Length up to 3000mm Purity: >=99.9% or 99.95%
Table 1: technology parameter
Recrystallization | 95%min |
Grain size | ASTM 4 or finer |
Surface finish | 16Rms max. or Ra 0.4 ( RMS64 or better) |
Flatness | 0.1mm or 0.15% max |
Tolerance | +/-0.010" on all dimensions |