Niobium target
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Description

Niobium sputtering targets, Niobium disc Material: RO4200-1, RO4210-2 Size: circular targets:  Diameter  10mm up to 400mm x Thickness 2mm up to 28mm rectangular targets: Thickness 1mm up to 20.32mm x Width up to 800mm x Length up to 3000mm Purity:  >=99.9%  or  99.95%  

 

Table 1: technology  parameter

Recrystallization 95%min
Grain sizeASTM 4 or finer
Surface finish16Rms max. or Ra 0.4 ( RMS64 or better)
Flatness 0.1mm or 0.15% max
Tolerance   +/-0.010" on all dimensions